Environmentally Conscious and Economically Sound Machine Dismantling Forum > Gurnee
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> Tegal 803 plasma inline etcher
Tegal 803 plasma inline etcher
Here is a Tegal 803 Plasma Etcher. The 803 Plasma Etcher is designed especially for the etching of silicon dioxide thin film deposited on single crystal or polysilicon semiconductor Wafers. It provides up to 4 process gasses, up to 2 process channels and a clean channel.
This item was sitting in a warehouse with working status unknown. The panels were not screwed in but the plasma etcher appears to be clean and complete. Please review the pictures for better detail.
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Huntington Beach, CA 92646
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