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> Lot: 4 ckd 1/4-turn manual valves c-seal mmgd-10V-AT2
Lot: 4 ckd 1/4-turn manual valves c-seal mmgd-10V-AT2
Lot: 4 CKD 1/4-Turn Manual Valves C-Seal MMGD-10V-AT2
* Quarter-turn manual operation
* Connection: C seal (SEMI F86, F87 compatible)
* Working fluid: Inert gas/process gas
* Working pressure range: 1.3x10-6Pa to 0.86MPa
* Fluid & Ambient working temperature range: -40 to 80C
* Valve seat leakage: Pa m3/s(He) 1x10-10m^3s He or less
* External leakage Pa m3/s(He) 2.8 10-12 or less
* Wetted surface areas electropolished
* Features outstanding valve sealing
* LOTO mechanism integrated to prevent incorrect operation
