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> Wj mfc interface card 977177-001 mass flow controller
Wj mfc interface card 977177-001 mass flow controller
Watkins Johnson circuit board card for the model WJ999, WJ1000 & WJ1500 series of deposition tools. This is a MFC mass flow controller interface card card WJ part number 977177-001 and schematic number 977178-001. This card is used as the 42 card, 43 card, 44 card, 45 card, 46 card and 47 card. These cards are located in the main electrical box and are the interface cards between the MFC regulator cards and the MFCs that are located in the gas box. Card is screened PWB 977176-001 as this is the card artwork P/N.
-the PDF version of the card 977177-001 on optical disc and additional hard printed copy which includes BOM listing all parts on card
-the PDF version schematic 977178 on optical disk and additional hard printed copy
-there are no alternate configurations for this card
This card from WJ is $483 at current price:
