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> Amat P5000 mark ii cvd emxp+ system 150MM
Amat P5000 mark ii cvd emxp+ system 150MM
AMAT P5000 Mark II CVD Tool System 150mm
This Applied Materials P5000 Mark II CVD tool is used surplus. The CVD tool is in good condition and feature two chambers and a load lock chamber. It may be missing some parts. The physical condition is good and clean, but there are signs of use. The P5000 includes a power rack with ENI RF generators, an AMAT heat exchanger, and other accessories.
* 5000 CVD Configured Chamber: 3012A
* Load Lock Chamber: 0010-70064
* Etch Process Chamber: A256D
* Helium Plate 3012: 0240-10024
* Alcatel ATH 400M turbopump & ACT 600M controller
* Power Rack Generators: OEM-12B, OEM-12A
* Other parts: monitors, RMP0115 kit, etc.
Robot 6 inch/ Cap Sensor/ Vacuum Chuck
Gas Panel Ampule TEOS Delivery
Mounting Configuration Through the wall
Chamber Positions A universal, D eMxP+
