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> Lam research 200MM poly plasma etcher 4420
Lam research 200MM poly plasma etcher 4420
Lam Research 200mm Poly Plasma Etcher 4420
This Lam Research plasma etcher is used surplus which came from a World Class Semiconductor Manufacturing Company known for there high Mantance Standards. The physical condition is good and clean, but there are signs of wear and there is some process residue in the exhaust port. It includes transfer arms, gas modules, power supplies, cover panels, and a Lam ENI RF generator cart, temperature control unit(chiller), power box, and various cables. This model has an upper match, and the lower electrode is grounded. It is a complete tool.
The etcher was tested and is in good working condition.
* ENI OEM-650A RF generator, 852-014681-583, 851-014680-583
* Model No: OEM-6A-11491-52, Serial No: 5375
* Lam chiller 2080 TCU, 852-110198-020 Rev.D
* AC power box: 685-017705-005
* Condition: Complete, servicable Edwards pumps not included.
