Environmentally Conscious and Economically Sound Machine Dismantling Forum > Milwaukee
> Welding and Laser Cutting
> TIG Welding of Non Ferrous Metals
> Plasma etcher, plasma etch, tegal 901E, vac pump, chill
Plasma etcher, plasma etch, tegal 901E, vac pump, chill
Refurbished Cassette to Cassette Polysilicon/Silicon Nitride Plasma Etcher. Work performed by Odean Hefta with over 20 years of experience working on Tegal plasma systems. System is sold with a 30 day warranty with consultation from Odean Hefta on proper facilitation and operation. (***)-621-8405
Currently configured for 4 in. (100mm) wafers.
ENI 1000 Watt 13.56 MHz RF Generator.
Process gases controlled by TYLAN MFC s
Non-friction spatula pick and place wafer transport.
Leybold D65 oxygen service pump
Tegal Closed loop temperature controller
Chart recorder for endpoint trace monitoring
Custom stainless steel table with valving.
